Papers by Author: Koichi Kitahara

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Growth of SiC Films using Tetraethylsilane
Authors: N. Kubo, Tadahiro Kawase, S. Asahina, Nobuyuki Kanayama, H. Tsuda, A. Moritani, Koichi Kitahara
269
Investigation of Crystal Defects in Epitaxial Layers on Nitrogen-Doped Substrates and a Method for their Suppression
Authors: Katsuhiko Nakai, Koichi Kitahara, Yasumitsu Ohta, Atsushi Ikari, Masahiro Tanaka
11
Defects in Polycrystalline Silicon Thin-Films Crystallized by Solid Phase and Excimer Laser Annealing
Authors: Koichi Kitahara, K. Ohnishi, Y. Katoh, K. Watakabe, A. Moritani
161
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