HOME CONTACT My eBook

Username: Password:

> @scientific.net

Articles by author: M. Imai

• Characterization of SiGe Layer on Insulator by In-Plane Diffraction Method
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p451)
• Microstructure and Mechanical Properties of Hot-Pressed Silicon Carbide Fiber-Reinforced Silicon Carbide Composite
  Published in: High Temperature Ceramic Matrix Composites III (p217)
• Optical Studies of Infrared Active Defects in Irradiated Si After Annealing at 450°C
  Published in: Defects in Semiconductors 18 (p157)
• Oxygen Precipitation in CZ Silicon Crystals Contaminated with Iron
  Published in: Defects in Semiconductors 18 (p1859)
• Preparation and Sintering of SiC Particulate Dispersed Al₂O₃ Fine Powders by Spray Pyrolysis Method
  Published in: The Science of Engineering Ceramics II (p407)
• Removal of Small (<100-nm) Particles and Metal Contamination in Single-Wafer Cleaning Tool
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p157)
• Silicon Surface Cleaning for Low Temperature Silicon Epitaxial Growth
  Published in: Ultra Clean Processing of Silicon Surfaces IV (p229)