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Papers by Author: M.J. Binns

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The Realization of Uniform and Reliable Intrinsic Gettering in 200mm p- and p/p- Wafers for a Low Thermal Budget 0.18μm Advanced CMOS Logic Process

Authors: M.J. Binns, A. Banerjee, R. Wise, D.J. Myers, T.A. McKenna

387

Shallow Thermal Donors in Annealed CZ Silicon and Links to the NL10 EPR Spectrum: The Relevance of H, Al and N Impurities

Authors: R.C. Newman, M.J. Ashwin, R.E. Pritchard, J.H. Tucker, Edward C. Lightowlers, T. Gregorkiewicz, I.S. Zevenbergen, C.A.J. Ammerlaan, Robert J. Falster, M.J. Binns

379

Vibrational Absorption from Oxygen-Hydrogen (O_i-H₂) Complexes in Hydrogenated CZ Silicon

Authors: R.E. Pritchard, M.J. Ashwin, R.C. Newman, J.H. Tucker, Edward C. Lightowlers, M.J. Binns, Robert J. Falster, S.A. McQuaid

283

Oxygen Aggregation Phenomena in Silicon

Authors: R.C. Newman, M.J. Binns, Charalamos A. Londos, S.A. McQuaid, J.H. Tucker

247

The Kinetics of Oxygen Loss and Thermal Donor Formation in Silicon at Temperatures between 350°C and 500°C

Authors: S.A. McQuaid, Charalamos A. Londos, M.J. Binns, R.C. Newman, J.H. Tucker

963

Hydrogen Solubility and Defects in Silicon

Authors: M.J. Binns, R.C. Newman, S.A. McQuaid, Edward C. Lightowlers

861