Papers by Author: M. Kanaya

Paper TitlePage

Investigation of Low Angle Grain Boundaries in Modified-Lely SiC Crystals by High Resolution X-ray Diffractometry
Authors: Masakazu Katsuno, Noboru Ohtani, Takashi Aigo, Hirokatsu Yashiro, M. Kanaya
493
Observation of Macrostep Formation on the (0001) Facet of Bulk SiC Crystals
Authors: Noboru Ohtani, Masakazu Katsuno, Takashi Aigo, Hirokatsu Yashiro, M. Kanaya
379
Etching Kinetics of α-SiC Single Crystals by Molten KOH
Authors: Masakazu Katsuno, Noboru Ohtani, J. Takahashi, Hirokatsu Yashiro, M. Kanaya, S. Shinoyama
837
Site Identification of 6H-SiC Using RBS/Channeling Technique
Authors: Masataka Satoh, Katsutomo Okamoto, Y. Iwata, K. Kuriyama, M. Kanaya, Noboru Ohtani
441
Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC
Authors: M. Kanaya, Hirokatsu Yashiro, Noboru Ohtani, Masakazu Katsuno, J. Takahashi, S. Shinoyama
359
Impurity Incorporation During Sublimation Bulk Crystal Growth of 6H- and 4H-SiC
Authors: Noboru Ohtani, Masakazu Katsuno, J. Takahashi, Hirokatsu Yashiro, M. Kanaya, S. Shinoyama
49
Showing 1 to 6 of 6 Paper Titles