Papers by Author: M.R. Yalamanchili

Paper TitlePage

Damage-Free Cleaning of Sub-50 nm Devices Using Directed Megasonics Technology in a Single Wafer Processor
Authors: J.J. Rosato, M.R. Yalamanchili, M.J. Beck, R.Y. Lillard
167
Single Wafer Immersion Process Incorporating a Novel Megasonics Configuration with an Advanced IPA Vapor Condensation Dry
Authors: J.J. Rosato, E.G. Baiya, J.A. Imonigie, M.R. Yalamanchili, E. Hansen
45
Removal of Heavy Organics by Supercritical CO2
Authors: Akshey Sehgal, M.R. Yalamanchili, C. Millet, Adrien Danel, F. Tardif
301
Showing 1 to 3 of 3 Paper Titles