Papers by Author: Nicolaas Stolwijk

Paper TitlePage

Abstract: The study of fast diffusion processes in materials requires short isothermal annealing treatments combined with an accurate temperature measurement. The paper discusses the special demands on rapid thermal annealing (RTA) devices in diffusion research and how these can be met in practice. The scientific impact of RTA for diffusion research in semiconductors is demonstrated by several examples dealing with fast impurities in Ge and Si.
35
1004
26
635
731
723
687
327
1457
Showing 1 to 10 of 30 Paper Titles