Papers by Author: R. Vanderhaghen

Paper TitlePage

Highly Crystalline Intrinsic Microcrystalline Silicon Films Using SiF4/Ar/H2 Glow Discharge Plasma
Authors: Satyendra Kumar, R. Brenot, Billel Kalache, V. Tripathi, R. Vanderhaghen, B. Drevillon, Pere Roca i Cabarrocas
237
Low-Temperature Plasma-Processed Microcrystalline Silicon Thin Films for Large-Area Electronics
Authors: Pere Roca i Cabarrocas, Surendra Kumar, V. Tripathi, P. Bulkin, R. Brenot, B. Drévillon, R. Vanderhaghen, I. French
361
Effects of Ion Bombardment upon Microcrystalline Silicon Growth
Authors: Billel Kalache, R. Brenot, V. Tripathi, Satyendra Kumar, R. Vanderhaghen, Pere Roca i Cabarrocas
71
Laser Pulsed Induced Microwave Conductivity and Spectroscopic Ellipsometry Characterization of Helium and Hydrogen Plasma Damage of the Crystalline Silicon Surface
Authors: H.C. Neitzert, N. Layadi, Pere Roca i Cabarrocas, R. Vanderhaghen, M. Kunst
209
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