Papers by Author: Stanislav I. Soloviev

Abstract: We report measurements and modeling of silicon carbide (SiC) based ultraviolet photodetectors for the detection of light in the mid-to-short ultraviolet range where SiC’s absorption coefficients are high and the corresponding penetration depths are low. These large absorption coefficients result in increased susceptibility of photo-generated electron and holes to surface recombination and therefore give rise to lower quantum efficiencies. To increase responsivity and extend the detection capability of these photodetectors to short ultraviolet wavelengths (or UVC), we measure an existing silicon carbide avalanche photodiode (APD) designed and fabricated for 280 nm operation by General Electric Global Research Center, and then develop models and techniques to increase their operation range to lower UV wavelengths. The measurements aid the development and calibration of a silicon carbide modeling and design suite that is currently being used to assist the design of a new silicon carbide APD for UVC detection. Here the design considerations require low operating voltages, low noise, low dark count rate and high responsivity. We plan to satisfy design criteria by engineering thickness and doping of stacked layers as well as by designing an APD surface that gives rise to minimal recombination of electrons and holes generated by the incident light.

Abstract: Bipolar degradation in 4H-SiC thyristors subjected to high current density stress is reported. The thyristor device structure, its fabrication process as well as testing conditions are described. The Electron Beam Induced Current (EBIC) technique was used for defect analysis in testing of both degraded and non-degraded devices. Possible nucleation sites responsible for the generation of observed defects in degraded devices are discussed

Abstract: We present overview of achieved results on 4H-SiC avalanche photodiodes (APDs) and arrays. Cost-effective solar-blind optical filter allows achieving high solar photon rejection ratio of more than 106 in combination with more than 40% single photon detection efficiency at 266nm. Three iterations of devices were fabricated and evaluated to compare their optical and electrical properties. Dark count rates and single photon detection efficiencies are the main characteristics compared for these three iterations of device designs.

Abstract: We report photomultiplication, M, and excess noise, F, measurements at 244nm and 325nm in two 4H-SiC separate absorption and multiplication region avalanche photodiodes (SAM-APDs). Sample A is a 4 x 4 array of 16 SAM-APDs. This structure possesses a relatively thin absorption layer resulting in more mixed injection, and consequently higher noise than sample B. The absorption layer of sample B does not deplete, so 244nm light results in >99% absorption outside the depletion region resulting in very low excess noise. Both structures exhibit very low dark currents and abrupt uniform breakdown at 194V and 624V for samples A and B respectively. Excess noise is treated using a local model [1]. The effective ratio of impact ionisation coefficients (keff) is approximately 0.007, this indicates a significant reduction in the electron impact ionisation coefficient, α, compared to prior work [2-5]. We conclude that the value of α will require modification if thick silicon carbide structures are to fit the local model for multiplication and excess noise.

Abstract: We present recent results on 4H-SiC avalanche photodiode arrays and SiC-based solid-state photomultiplier arrays suitable for ultraviolet and solar-blind light detection. A novel SiC-based photomultiplier array was demonstrated. An additional solar-blind filter enabled a solar photon rejection ratio of more than 106 in combination with 40% quantum efficiency at 280 nm.

Abstract: 4H-SiC single photon avalanche diodes are reported. A separate absorption and multiplication non-reach through device structure was optimized for operation in Geiger mode. An estimated dark current at a gain of 1000 was ranging between 0.4 pA (0.75 nA/cm2) and 20nA (38 A/cm2) on devices with an effective mesa diameter of 260 m. The electron beam induced current technique was used to image defects in the active region of studied devices. Increased reverse bias leakage current and increased Geiger mode dark count probability were correlated with the presence of large number of defects. Single photon detection efficiencies of up to 11% were measured at a wavelength of 266 nm in Geiger mode.

Abstract: In this work, solar-blind UV 4H-SiC avalanche photodetectors were fabricated and tested in linear and Geiger modes. APDs with both PIN and separate absorption and multiplication (SAM) structures were investigated. PIN structures demonstrated higher quantum efficiencies while the SAM structure exhibit lower leakage currents. Deposition of a thin film optical filter on top of the devices was used to provide a high photon rejection ratio of (Stas add value here). However, an external filter showed a better photon rejection ratio compared to the deposited one by about one order of magnitude.

Abstract: In this work, avalanche photodiodes (APDs) were fabricated using a-plane 6H- and 4H-SiC materials to investigate their electrical and optical properties. Temperature dependence of avalanche breakdown was measured. The diode structures were fabricated with positive angle beveling and oxide passivation to ensure a uniform breakdown across the device area. Despite the apparent presence of micro-plasmas, we observed that the breakdown voltage of a-plane 6H-SiC APDs increased with temperature suggesting a positive temperature coefficient.

Abstract: Hole initiated multiplication characteristics of 4H-SiC Separate Absorption and Multiplication Avalanche Photodiodes (SAM-APDs) with a n- multiplication layer of 2.7 µm were obtained using 325nm excitation at temperatures ranging from 300 to 450K. The breakdown voltages increased by 200mV/K over the investigated temperature range, which indicates a positive temperature coefficient. Local ionization coefficients, including the extracted temperature dependencies, were derived in the form of the Chynoweth expression and were used to predict the hole multiplication characteristics at different temperatures. Good agreement was obtained between the measured and the modeled multiplication using these ionization coefficients. The impact ionization coefficients decreased with increasing temperature, corresponding to an increase in breakdown voltage. This result agrees well with the multiplication characteristics and can be attributed to phonon scattering enhanced carrier cooling which has suppressed the ionization process at high temperatures. Hence, a much higher electric field is required to achieve the same ionization rates.

Abstract: In this work, we observed and investigated electro-luminescence (EL) from defects in 4H-SiC avalanche photodiodes. The EL irradiance originated from parallel lines oriented along the [11-20] crystallographic direction. Optical microscopy imaging was employed to analyze the intensity distribution of luminescencing lines at different current densities. Electron beam induced current (EBIC) methodology was employed to find correlation between the luminescencing defects and dislocations in the epi-layers. TEM analysis of the substrate region having the brightest luminescencing line was performed. There were a few defects at the depth of about 3 μm from the sample surface where EL intensity had the highest value.