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Papers by Author: Y. Shiina

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Determination of Effective Diffusion Coefficient of Copper in Silicon by Diffusion from Bulk into the Polysilicon Backside

Authors: Mohammad B. Shabani, K. Hirano, Y. Shiina, T. Kihara, T. Shingyoji

385

Tuning Oxygen Concentration at Low and High Temperature IG Process and Boron Concentration in Epitaxial Wafer for the Gettering of Metal Impurities

Authors: Mohammad B. Shabani, Y. Shiina, Y. Shimanuki

539

Iron Solubility in Boron-Doped Silicon and Fe Gettering Mechanism in p/p⁺ Epitaxial Wafers

Authors: Mohammad B. Shabani, Y. Shiina, S. Shimanuki, F.G. Kirscht

331