Articles by author: Y. Shiina
3 papers on 1 page:
1
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Determination of Effective Diffusion Coefficient of Copper in Silicon by Diffusion from Bulk into the Polysilicon Backside
Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p385) -
Iron Solubility in Boron-Doped Silicon and Fe Gettering Mechanism in p/p+ Epitaxial Wafers
Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p331) -
Tuning Oxygen Concentration at Low and High Temperature IG Process and Boron Concentration in Epitaxial Wafer for the Gettering of Metal Impurities
Published in: Gettering and Defect Engineering in Semiconductor Technology X (p539)