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Articles by keyword: «Airborn Molecular Contamination (AMC)»

• Deposition Behavior of Volatile Acidic Contaminants on Metallic Interconnect Surfaces
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p365)
• Mechanical Behavior of Al-Mg-Si Alloys Reinforced with Ceramic and Intermetallic Particles
  Published in: Advanced Powder Technology III (p219)
• Plastic Containers Contamination by Volatile Acids : Accumulation, Release and Transfer to Cu-Surfaces during Wafers Storage
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p251)
• Reduction of Airborne Molecular Contamination on 300 mm Front Opening Unified POD (FOUP) and Wafers Surface by Vacuum Technology
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p139)
• Study of the Volatile Organic Contaminants Absorption and their Reversible Outgassing by FOUPs
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p143)