Authors: Akin Akturk, Brendan Cusack, Neil Goldsman
Abstract: We are in the process of designing and fabricating a very large area (> 4mm2) and extremely low dark current silicon carbide ultraviolet photodiode with a readout circuitry monolithically fabricated on the same die. This is a large area silicon carbide based active pixel sensor (APS), capable of measuring low power density deep ultraviolet photons as well as low energy particles. To this end, we have already fabricated several large area photodiodes with low dark current values and large ultraviolet responsivities. We here report the electrical and optical measured performance of various size photodiodes we have fabricated.
1023
Authors: Alexey V. Vert, Stanislav I. Soloviev, Peter M. Sandvik
Abstract: We present overview of achieved results on 4H-SiC avalanche photodiodes (APDs) and arrays. Cost-effective solar-blind optical filter allows achieving high solar photon rejection ratio of more than 106 in combination with more than 40% single photon detection efficiency at 266nm. Three iterations of devices were fabricated and evaluated to compare their optical and electrical properties. Dark count rates and single photon detection efficiencies are the main characteristics compared for these three iterations of device designs.
543
Authors: Jing Guo, He Zhang, Xiang Jin Zhang, Xiao Feng Wang
Abstract: For the extremely weak echo signal and the poor anti-interference ability of the long-distance laser fuze, the high signal noise ratio (SNR) receiving system based on laser coding mode was designed. In order to improve the weak signal receiving ability, the avalanche photodiode (APD) with high sensitivity, low noise and high gain was adopted. And the optimum multiplication factor of APD when the system obtains the highest SNR was analyzed and calculated. Then, the amplifying circuit optimum matching with APD and the decoding circuit were designed, and validated by the experiments. The theory and experiment results indicate that the design is efficiency and capable to the long distance laser fuze, the system can exactly decode the weak laser coding signals received and export the ignition signal.
3745
Authors: Mietek Bakowski, Adolf Schöner, Ingemar Petermann, Susan Savage
Abstract: This paper describes a novel design to achieve sensitive and stable performance of an avalanche photodiode based on silicon carbide material. The design includes a field-stopping layer with limited extension, and junction termination, in order to achieve avalanche multiplication only in the central region of the device. Also, sensitivity is increased by the achievement of a rectangular field distribution, and full depletion of the absorption region by the onset of avalanche multiplication. Evaluation of devices produced with this design show that a low leakage current and a sharp and stable avalanche breakdown point around 120V is achieved. Optical responsivity to radiation of wavelength 200 to 400 nm is shown to increase with increasing applied reverse bias, until a factor of 8 increase is achieved at the breakdown voltage.
1089
Authors: James E. Green, W.S. Loh, John P.R. David, R.C. Tozer, Stanislav I. Soloviev, Peter M. Sandvik
Abstract: We report photomultiplication, M, and excess noise, F, measurements at 244nm and 325nm in two 4H-SiC separate absorption and multiplication region avalanche photodiodes (SAM-APDs). Sample A is a 4 x 4 array of 16 SAM-APDs. This structure possesses a relatively thin absorption layer resulting in more mixed injection, and consequently higher noise than sample B. The absorption layer of sample B does not deplete, so 244nm light results in >99% absorption outside the depletion region resulting in very low excess noise. Both structures exhibit very low dark currents and abrupt uniform breakdown at 194V and 624V for samples A and B respectively. Excess noise is treated using a local model [1]. The effective ratio of impact ionisation coefficients (keff) is approximately 0.007, this indicates a significant reduction in the electron impact ionisation coefficient, α, compared to prior work [2-5]. We conclude that the value of α will require modification if thick silicon carbide structures are to fit the local model for multiplication and excess noise.
1081
Authors: Alexey V. Vert, Stanislav I. Soloviev, Peter M. Sandvik
Abstract: We present recent results on 4H-SiC avalanche photodiode arrays and SiC-based solid-state photomultiplier arrays suitable for ultraviolet and solar-blind light detection. A novel SiC-based photomultiplier array was demonstrated. An additional solar-blind filter enabled a solar photon rejection ratio of more than 106 in combination with 40% quantum efficiency at 280 nm.
1069
Authors: Alexey V. Vert, Stanislav I. Soloviev, Jody Fronheiser, Peter M. Sandvik
Abstract: 4H-SiC single photon avalanche diodes are reported. A separate absorption and multiplication non-reach through device structure was optimized for operation in Geiger mode. An estimated dark current at a gain of 1000 was ranging between 0.4 pA (0.75 nA/cm2) and 20nA (38 A/cm2) on devices with an effective mesa diameter of 260 m. The electron beam induced current technique was used to image defects in the active region of studied devices. Increased reverse bias leakage current and increased Geiger mode dark count probability were correlated with the presence of large number of defects. Single photon detection efficiencies of up to 11% were measured at a wavelength of 266 nm in Geiger mode.
877
Authors: L.B. Rowland, Jeffery L. Wyatt, Jody Fronheiser, Alexey V. Vert, Peter M. Sandvik, T. Borsa, J. Van Zeghbroeck, Bart Van Zeghbroeck, S. Babu
Abstract: We report on the fabrication and testing of SiC p-i-n avalanche photodiodes. APDs of 0.25 mm2 area on a-plane (1120) 6H-SiC as well as off-axis Si face 6H and 4H-SiC were successfully fabricated. A beveled mesa was used as edge termination. Recessed windows were formed using reactive ion etching to enhance low-wavelength UV performance. We performed current-voltage tests with and without UV illumination to determine dark current, photocurrent, and gain on selected devices. Dark current was less than 1 pA at 0.5Vbr on multiple devices. Quantum efficiency of 40% or greater was observed for all orientations and polytypes.
869
Authors: W.S. Loh, John P.R. David, B.K. Ng, Stanislav I. Soloviev, Peter M. Sandvik, J.S. Ng, C. Mark Johnson
Abstract: Hole initiated multiplication characteristics of 4H-SiC Separate Absorption and Multiplication Avalanche Photodiodes (SAM-APDs) with a n- multiplication layer of 2.7 µm were obtained using 325nm excitation at temperatures ranging from 300 to 450K. The breakdown voltages increased by 200mV/K over the investigated temperature range, which indicates a positive temperature coefficient. Local ionization coefficients, including the extracted temperature dependencies, were derived in the form of the Chynoweth expression and were used to predict the hole multiplication characteristics at different temperatures. Good agreement was obtained between the measured and the modeled multiplication using these ionization coefficients. The impact ionization coefficients decreased with increasing temperature, corresponding to an increase in breakdown voltage. This result agrees well with the multiplication characteristics and can be attributed to phonon scattering enhanced carrier cooling which has suppressed the ionization process at high temperatures. Hence, a much higher electric field is required to achieve the same ionization rates.
311
Authors: Stanislav I. Soloviev, Peter M. Sandvik, Alexey Vertiatchikh, K. Dovidenko, Ho Young Cha
Abstract: In this work, we observed and investigated electro-luminescence (EL) from defects in
4H-SiC avalanche photodiodes. The EL irradiance originated from parallel lines oriented along
the [11-20] crystallographic direction. Optical microscopy imaging was employed to analyze the
intensity distribution of luminescencing lines at different current densities. Electron beam
induced current (EBIC) methodology was employed to find correlation between the
luminescencing defects and dislocations in the epi-layers. TEM analysis of the substrate region
having the brightest luminescencing line was performed. There were a few defects at the depth of
about 3 μm from the sample surface where EL intensity had the highest value.
1211