Papers by Keyword: CVD Reactor

Abstract: The present research work describes deposition of titania onto Fe powder using a homemade fluidized bed CVD reactor and titanium tetrachloride as the precursor. The as-deposited particles were examined in terms of microstructure and magnetic behavior by means of SEM, XRD, FTIR and VSM. It was realized that high quality TiO₂ deposition onto iron particles was possible. The produced thin films were microcrystalline and homogenous, with the optimum conditions being in the range of 800-900 ^OC and a TiCl₄:air ratio equal to 1:15-1:25.