Articles by keyword: «Electron Cyclotron Resonance Plasma»
5 papers on 1 page:
1
-
AlN Epitaxial Films Grown by ECR Plasma Assisted Metalorganic Chemical Vapor Deposition under Controlled Plasma Condition in Afterglow Region
Published in: Silicon Carbide and Related Materials - 1999 (p1511) -
Characterization of Polycrystalline GaN Layers Grown on Alkali-Metal-Free Glass Substrates by Molecular-Beam Epitaxy Assisted by Electron Cyclotron Resonance Plasma
Published in: Polycrystalline Semiconductors VII (p307) -
Fabrication of Large-Area Imprint Mold with High-Aspect-Ratio Nanotip Arrays of Sub-Micron Diameter
Published in: Optics Design and Precision Manufacturing Technologies (p607) -
Growth of Hydrogenated Amorphous Silicon in Electron Cyclotron Resonance Plasma
Published in: Hydrogenated Amorphous Silicon (p135) -
Low-Temperature Deposition of Microcrystalline Silicon by Microwave Plasma-Enhanced Sputtering
Published in: Polycrystalline Semiconductors V (p119)