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Keyword: "HCl Etching"
Papers by keyword:
Paper Title Page

Gaseous Etching Effects on Homoepitaxial Growth of SiC on Hemispherical Substrates Using CVD

Authors: Shigehiro Nishino, Yasuichi Masuda, Satoru Ohshima, Chacko Jacob

123

HCl Etching Behavior on Low-Tilt-Angle and Step-Free 4H-SiC Surfaces

Authors: Andrew J. Trunek, J. Anthony Powell, Philip G. Neudeck, M. Mrdenovich

593

Surface Morphology of 4H-SiC Inclined towards <1-100> and <11-20> Grown by APCVD Using the Si2Cl6+C3H8 System

Authors: Yasuichi Masuda, Satoru Ohshima, Chacko Jacob, Shigehiro Nishino

139

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