Keyword: "Intrinsic Stress"
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Correlation between Intrinsic Stress Distribution and Crystallographic Defects Density Profile in Czochralski Silicon after CMOS Processing

Authors: T. Piotrowski, W. Jung

519

Effect of Inhomogeneous Intrinsic Stresses on the Cracking of Layered Brittle Coatings

Authors: O. Jørgensen, A. Horsewell, B.F. Sørensen, P. Leisner

351

Optical Study of Defect Distributions in CVD Diamond

Authors: I.I. Vlasov, V.G. Ralchenko

61

Origin of the Warpage of 3C-SiC Wafer: Effect of Nonuniform Intrinsic Stress

Authors: Yu Sun, Satoshi Izumi, Shinsuke Sakai, Kuniaki Yagi, Hiroyuki Nagasawa

501

Real Time Optical Method of Stress Measurements in Thin Films

Authors: G. Moulard, G. Contoux, G. Motyl, M. Courbon

141

Residual Stress Evaluation in TiN Coatings Used for Erosion Protection of Aerospace Components

Authors: Mariusz Bielawski

867

Residual Stresses in Surface Coatings and Their Effects on Interfacial Debonding

Authors: T.W. Clyne

307

Stress Development in Ni/C-Multilayers on Si-Substrates with Increasing Period Number

Authors: Jürgen Schreiber, Valeri Melov, Reiner Dietsch

797

Stress in Silicon Nitride Films and Its Effect on Boron Diffusion in Silicon

Authors: Satoshi Matsumoto, K. Osada, Y. Zaitsu, T. Shimizu, Eisuke Arai, Shoichiro Tanigawa, F. Uberti

25

Study of the Thermal and Intrinsic Stress of Large Area Diamond Film Prepared by HFCVD

Authors: Feng Xu, Dun Wen Zuo, Wen Zhuang Lu, Min Wang, Hai Yu Zhang

123

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