Papers by Keyword: Low-k Films

Abstract: Laser-generated surface acoustic waves (LSAWs) technique is a feasible method to determine the Young’s modulus of thin films. The raw surface acoustic wave (SAW) signals detected from the experimental system are often contaminated by external noises. A novel de-noising method is proposed in this paper with wavelet and FIR filter. The wavelet threshold de-noising is essential to reduce the high frequency noise components in the raw SAW signals, while FIR filter can remove the useless low frequency noises. The useful bandwidth of the detected signal ranges from 50 to 190 MHz. Young’s modulus of the detected samples can be obtained by matching the experimental dispersive curves with the theoretical calculated ones via an improved least square fitting method. The Young’s moduli of four low dielectric constant (low-k) samples detected in the measurement are 7.1, 6.8, 1.1 and 1.0 GPa, respectively.

Abstract: The compatibility of chemical solutions with different pH is studied on microporous silica-based (SiOCH) and mesoporous methylsilsesquioxane (MSQ) based low-k materials. The surface and bulk properties of as-deposited and O2/CF4 plasma-treated low-k films have been studied after several wet treatments.