Papers by Keyword: Nanopositioning

Abstract: This paper presents design of micro stage performing 6 degree-of-freedom (DOF) motions, which actuated by voice coil motor (VCM). The VCMs generate forces to perform in-plane motions and out-of-plane motions. The stage is supported by springs for compensating mass of the moving part of the stage and the stiffness of the springs has been chosen to meet the moving range requirement and to have high resonant frequency at the same time. Moving magnet type has been selected against moving coil type due to few merits of the type. The size of the stage is 380 X 380 X 60 mm³ and the motions are measured by laser interferometer and gap sensors.

Abstract: In order to realize the functions such as the real-time monitoring of running status, the system performance analysis and the parameter optimization set and download, this paper designed the monitoring software of the nanopositioning control system. The unified modeling language was adopted to analyse and design the monitoring software modularly, and the software consisted of the USB communication module, the performance analysis module, the displacement module, the calibration analysis module and the parameters configuration module. Through testing the control system, the experimental results showed that the monitoring software is reliable and stable, and add multiple analysis functions. It is operated conveniently and meet the users needs.

Abstract: In this paper, a new actuator with nanoscale micro-displacement is reported. The actuator not only can achieve a large stroke and nanoscale positioning accuracy, but also has the advantages of compact, low cost, high reliability and a single control system. The drive is controlled by a single power, and it consists of stepper motor, harmonic gear reducer, screw and the guide rail. The stepper motor is controlled by the pulse train and the harmonic gear reducer has high precision and small hysteresis. The precision screw converts the rotary motion of the stepper motor into linear displacement, and the plunger pushes the target in nanoscale motion accuracy through the guide rail finally.

Abstract: The purpose of this paper was to generate several possible configurations of micro/nano-positioning stage with bridge-type mechanism based on graph theory. The structural characteristics of stage were discussed first. Then, these modules made up of micro/nano-positioning stage were abstracted. Thus the stage could be described with a tree-graph. According to the spanning tree theory, several possible configurations of stage are enumerated correspondingly. Subsequently, the configuration synthesis of six bridge-type mechanisms was investigated and 720 results were obtained. Rules for generating structures with symmetry are established. On the basis of this, several innovative structures are presented. Furthermore, the result of this paper provides a practicable approach for the structural design of stage and the design method based on graph theory is effective.

Abstract: A 6-DOF monolithic nanopositioning stage is developed for three coordinate measuring machines (CMM) with nanometer resolution. The stage consists of a monolithic flexure hinge mechanism, six piezoelectric actuators and six fiber-optic displacement sensors. A mathematical model of the constraint optimization problem is presented. Based on the solution of the optimization problem, the final design of the 6-DOF stage is also presented. The numerical analysis on static and dynamic behavior of the stage is done by using the finite element method. The experimental results of the performance of the 6-DOF stage are presented.

Abstract: The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.