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Papers by Keyword: Plasma Enhanced Chemical Vapour Deposition

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Intrinsic Microcrystalline Silicon for Solar Cells

Authors: O. Vetterl, P. Hapke, O. Kluth, A. Lambertz, S. Wieder, B. Rech, F. Finger, H. Wagner

101

Modeling of Growth Processes in Epitaxial Reactors

Authors: S. Carrà, C. Cavallotti, Maurizio Masi

135

Nanoscale Ordering in Amorphous Silicon Powders Formed by Plasma Induced Reaction of Silane

Authors: Herbert Hofmeister, Joydeep Dutta, H. Hofmann

595

Very High Frequency Glow Discharge: Plasma- and Deposition Aspects

Authors: H. Keppner, U. Kroll, J. Meier, A. Shah

97