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Articles by keyword: «Rapid Thermal Processing»

• A Perspective from Crystal Growth and Wafer Processing on the Properties of Intrinsic Point Defects in Silicon
  Published in: Defects and Diffusion in Semiconductors IV (p125)
• A Short History of Pattern Effects in Thermal Processing
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p355)
• Evolution of Commercial RTP Modules
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p21)
• Fabrication of 4H-SiC DIMOSFETs by High-Temperature (>1400ºC) Rapid Thermal Oxidation and Nitridation Using Cold-Wall Oxidation Furnace
  Published in: Silicon Carbide and Related Materials 2005 (p1309)
• Influence of Thermal Treatments on the Crystallisation of LPCVD-Deposited Si Thin Films
  Published in: Polycrystalline Semiconductors VI (p199)
• Interdiffusion of Mn and Mg Ions in CdTe-Based Quantum Wells, Studied by Spin Tracing
  Published in: Defects and Diffusion in II-VI Compounds (p47)
• Model Based Measurement in Advanced Rapid Thermal Processing
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p403)
• Modern Technologies for Polycrystalline Silicon Solar Cells
  Published in: Polycrystalline Semiconductors IV (p461)
• Optimization of Chamber Design and Rapid Thermal Processing Regimes for SiC Substrates by Temperature and Thermal Stress Distribution
  Published in: Silicon Carbide and Related Materials - 2002 (p107)
• Rapid Thermal Processing and the Control of Oxygen Precipitation Behaviour in Silicon Wafers
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p45)
• Short-Time Diffusion of Aluminium in Silicon and Co-Diffusion with Phosphorus and Boron
  Published in: Diffusion in Materials DIMAT 1996 (p1009)
• Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p581)