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Papers by Keyword: Secondary Defects

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Influence of Implantation Temperature and Dose Rate on Secondary Defect Formation in 4H-SiC

Authors: Toshiyuki Ohno, Kensuke Amemiya

823

Secondary Defect Distribution in High Energy Ion Implanted 4H-SiC

Authors: Takaya Ohno, Naoto Kobayashi

913

Defects Below Mask Edges in Silicon Induced by Amorphizing Implantations

Authors: Hans Cerva

103

Secondary Defects and Deep Levels in N-Si Induced by High Energy P Ion Implantation

Authors: S. Tatsukawa, Yuko Nakahara, Satoshi Matsumoto

1875