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Articles by keyword: «Secondary Defects»

• Defects Below Mask Edges in Silicon Induced by Amorphizing Implantations
  Published in: Defect and Diffusion Forum Vols. 148-149 (p103)
• Influence of Implantation Temperature and Dose Rate on Secondary Defect Formation in 4H-SiC
  Published in: Silicon Carbide and Related Materials 2001 (p823)
• Secondary Defect Distribution in High Energy Ion Implanted 4H-SiC
  Published in: Silicon Carbide and Related Materials - 1999 (p913)
• Secondary Defects and Deep Levels in N-Si Induced by High Energy P Ion Implantation
  Published in: Defects in Semiconductors 18 (p1875)