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Articles by keyword: «Silicon Substrates»

• Defects of Silicon Substrates Caused by Electro-Static Discharge in Single Wafer Cleaning Process
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p185)
• Delineation of Microdefects in Silicon Substrates by Chromium-Free Preferential Etching Solutions and Laser Scattering Tomography
  Published in: Gettering and Defect Engineering in Semiconductor Technology XIII (p443)
• Evaluation of Interface Strength between Thin Films Fabricated on a Silicon Substrate for an Advanced LSI on the Basis of Fracture Mechanics Concept
  Published in: THERMEC'2003 (p3469)
• Growth of GaN Nano-Column on Si (111) Substrate Using Au+Ga Alloy Seeding by Pulsed Flow Method Using MOCVD
  Published in: Semiconductor Photonics: Nano-Structured Materials and Devices (p108)
• Laser Micromachining of Silicon Substrates
  Published in: Advances in Abrasive Technology XII (p416)