Papers by Keyword: Steam Annealing

Paper TitlePage

Effects of Successive Annealing of Oxides on Electrical Characteristics of Silicon Carbide Metal-Oxide-Semiconductor Structures
Authors: Masahito Yoshikawa, Mirei Satoh, Takeshi Ohshima, Hisayoshi Itoh
1009
Steam Annealing Effects on CV Characteristics of MOS Structures on (11-20) Face of 4H-SiC
Authors: Masahito Yoshikawa, Takeshi Ohshima, Hisayoshi Itoh, Kunimasa Takahashi, Makoto Kitabatake
635
Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures
Authors: Masahito Yoshikawa, Kazutoshi Kojima, Takeshi Ohshima, Hisayoshi Itoh, Sohei Okada, Yuuki Ishida
1129
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