Authors: C. Oliveira, Carlos M. Costa, L. Rebouta, T. Viseu, T. de Lacerda-Arôso, Senentxu Lanceros-Méndez, Eduardo Alves
Abstract: Transparent conducting Al doped ZnO films have been deposited by dc magnetron
sputtering on glass and polymer substrates at room temperature. Depositions have been carried out
from an AZOY (contains a small amount of Y2O3 in addition to Al2O3 and ZnO) target under
different conditions such as working pressure, substrate bias voltage and oxygen flow rate. The
crystallinity of the Al doped ZnO films has been improved by using low-energy-ion bombardment.
Likewise, the use of either the rotation or the static mode of the substrate during deposition
influences the crystallinity and therefore the optical parameters and the electrical resistance of the
films. Increasing the thickness of the films reduces the threshold strain at which the films can be
deformed without provoking significant changes on their electrical properties.
834
Authors: Peter Gerhardinger, David Strickler
Abstract: Thin film coatings of fluorine doped tin oxide on glass were first produced in the 1940’s
as part of the World War II effort. Generically known as TCO (Transparent Conductive Oxide)
Coatings, the primary use was for antifogging coatings for aircraft transparencies using an electrical
current to heat the glass assembly. Nearly 60 years later, these coatings are still used in cockpit
glazings. Although the first generation coatings were applied using spray pyrolysis on heated glass
panes, by 1990 these coatings were being applied directly on the float glass ribbon during the
primary glass manufacturing operation, using Atmospheric Pressure Chemical Vapor Deposition
(APCVD). As part of a color suppressed multi-layer structure, these coatings met the aesthetic
and performance criteria for architectural low E glazings, and spawned new applications in
electrochromic devices, heated freezer doors, radiant glass heaters, EMI/RFI Shielding, and the
largest growing segment in glass – thin film photovoltaic panels.
In this paper we discuss the characteristics of the on-line production, the performance
characteristics of the coatings, the end use requirements, and the massive infrastructure in place
worldwide to support the volume requirements. We compare the properties of SnO2:F to other
emerging TCO materials such as zinc oxide.
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Authors: Eun Soo Lee, Rachmat Adhi Wibowo, Kyoo Ho Kim
Abstract: Al-doped ZnO (AZO) thin films were grown on Corning 1737 glass by RF Magnetron
Sputtering under premixed hydrogen-argon (H2/Ar) sputtering gas. It is found that the introduction of
various H2 concentrations during sputtering deposition altered the properties of Al-doped ZnO films.
The presence of H2 during AZO growth at low deposition temperature leads to the growth of a-axis
preferential orientation crystal whereas c-axis preferential orientation occurred only at higher
deposition temperature. Highly oriented c-axis (002) crystal has been successfully grown under 3%
H2 concentration at 200°C deposition temperature. Film’s resistivity is appeared to be a function of H2
concentration. Additional H2 concentration in sputtering gas increased of film’s transmittance up to
85% at visible-near infra red spectra while it caused the Burstein-Moss shift toward the blue region at
350 nm wavelength.
215
Authors: Leandro Raniero, Alexandra Gonçalves, Ana Pimentel, Shibin Zhang, Isabel Ferreira, Paula M. Vilarinho, Elvira Fortunato, Rodrigo Martins
Abstract: In this work we studied the influence of the power density of hydrogen plasma on
electrical and optical properties (Hall mobility, free carrier concentration, sheet resistance, optical transmittance and a.c. impedance) of indium zinc oxide films, aiming to determine their chemical stability. This is an important factor for the optimization of amorphous/nanocrystalline p-i-n hydrogenated silicon (a/nc-Si:H) solar cells, since they should remain chemically highly stable during the p layer deposition. To perform this work the transparent conductive oxide was exposed
to hydrogen plasma at substrate temperature of 473 K, 87 Pa of pressure and 20 sccm of hydrogen flow. The results achieved show that IZO films were reduced for all plasma conditions used, which leads mainly to a decrease on films transmittance. For the lowest power density used in the first minute of plasma exposition the transmittance of the IZO films decreases about 29%.
63
Authors: Prasanta Kumar Biswas
Abstract: Nanostructured transparent conducting oxide (TCO) films such as tin doped indium oxide
(ITO), antimony doped tin oxide (ATO), tin doped cadmium oxide (CTO) were deposited on suprasil
grade pure silica glass from their respective precursors with wide variation of dopant concentration,
10, 30, 50, 70 at. % and their optical properties have been studied. The films were obtained by thermal
curing (350 - 500°C) in air. If the cluster size be decreased to nanoscale then blue shift of bulk band
gap occurs due to the quantum confinement effect of the semiconducting TCO materials. Free carrier
concentration of ITO and ATO films were in the order of 1019 cc-1. The Moss-Burstein shift occurred
in each case. The photoluminescence (PL) behaviour of the nanostructured materials revealed
emissions for the HOMO-LUMO excitonic transitions. This was identified by selecting the excitation
energy according to the photoluminescence excitonic transitions (PLE).
183
Authors: Hiromichi Ohta, Masahiro Orita, M. Hirano, Hideo Hosono
75
Authors: D. Briand, M. Sarret, T. Mohammed-Brahim, S. Mottet, O. Bonnaud
573