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Articles by keyword: «ULSI»

• A Formation Mechanism of X Level due to an Indium-Carbon Dimer in Silicon
  Published in: Progress in New Materials and Mechanics Research (p154)
• Comparison of Direct Numerical Procedure and Monte Carlo Technique to Determine the Charging Effects in Submicron Structures
  Published in: Progress in Advanced Materials and Processes (p9)
• Corrosion Inhibiting Effect on Copper Chemical Mechanical Planarization (CMP) in Fe(NO₃)₃ Based Slurries
  Published in: Advances in Abrasive Technology VIII (p395)
• Crystal Plasticity Analysis of Dislocation Accumulation in ULSI Cells with Consideration of Temperature Dependence of the Lattice Friction Stress for Silicon
  Published in: Engineering Plasticity and Its Applications (p199)
• Crystal Plasticity Analysis of Thermal Deformation and Dislocation Accumulation in ULSI Cells
  Published in: Fracture and Damage Mechanics V (p1035)
• Defects Below Mask Edges in Silicon Induced by Amorphizing Implantations
  Published in: Defect and Diffusion Forum Vols. 148-149 (p103)
• Effect of Plating Condition on the Mechanical Properties and Residual Stress of Electroplated Copper Film
  Published in: Advanced Materials and Processing (p637)
• Effects of Current Waveform and Bath Temperature on Surface Morphology and Texture of Copper Electrodeposits for ULSI
  Published in: Textures of Materials - ICOTOM 13 (p1657)
• Electronic Structures of Donor-Acceptor-Donor Trimer Codopants in Silicon
  Published in: Optical, Electronic Materials and Applications (p402)
• Material Characteristics and Electrical Modeling of Ultra Thin Copper Oxides in ULSI Application
  Published in: PRICM 6 (p1225)
• Research on Effects of Slurry Additives in Cu CMP for ULSI Manufacturing
  Published in: Advances in Grinding and Abrasive Technology XIII (p350)
• Simulation of Dislocation Accumulation in ULSI Cells of Reduced Gate Length
  Published in: PRICM7 (p1682)
• The Effects of Current Type and Density on Dishing Phenomena in CMP Process
  Published in: Advances in Nanomaterials and Processing (p307)