Fault Prediction Method Based on Data Mining in Semiconductor Test Line

Ren Hong Yue; Yu Min Ma; Fei Qiao; Xing Hao Wu

doi:10.4028/www.scientific.net/AEF.2-3.706

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Fault Prediction Method Based on Data Mining in Semiconductor Test Line
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HomeAdvanced Engineering ForumAdvanced Engineering Forum Vols. 2-3Fault Prediction Method Based on Data Mining in...

Fault Prediction Method Based on Data Mining in Semiconductor Test Line

Abstract:

In semiconductor test system, test equipment all have a period of usage. When the test time of equipment is larger than its period of usage, its fault will occur frequently. This paper will use data mining method to predict the next time point of fault based on the history data related to equipment fault. By this, a method of equipment fault prediction will be put forward, and provide the decision support for semiconductor equipment maintenance.

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Periodical:

Advanced Engineering Forum (Volumes 2-3)

Pages:

706-710

DOI:

https://doi.org/10.4028/www.scientific.net/AEF.2-3.706

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Online since:

December 2011

Authors:

Ren Hong Yue, Yu Min Ma, Fei Qiao, Xing Hao Wu

Keywords:

Data Mining (DM), Decision Support, Fault Prediction, Semiconductor Test

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Creative Commons CC BY 4.0

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