Rigid contact model of rotor/stator in ring type traveling wave ultrasonic motor without frictional material based on finite element method is proposed in this paper. First, the vibration of the stator is analyzed. Next, the rigid contact model is simulated by finite element method. Subsequently, the contact mechanism of the rotor/stator as well as performance of the ultrasonic motor is studied, and the performance of motors with two different kinds of rotor is compared. It is indicated that contact length of the rotor/stator along circumferential direction decreases from the outer to the inner edge and the stall torque increases and no-load speed decreases with preload force increasing. The result is identified as being useful in designing and analyzing the ultrasonic motor.