A More Effective Technique of Design Synthesis for MEMS with Expected Performance

Abstract:

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A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equations. This behavior equation group can be solved using any solution algorithm of non-linear equation group. Newton Iteration Method based on sensitivity is adopted. Comparing with Genetic Optimization Algorithm (GA) , computational workload of DSA is greatly decreased.

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Periodical:

Edited by:

Dongye Sun, Wen-Pei Sung and Ran Chen

Pages:

637-641

DOI:

10.4028/www.scientific.net/AMM.121-126.637

Citation:

S. X. Chen "A More Effective Technique of Design Synthesis for MEMS with Expected Performance", Applied Mechanics and Materials, Vols. 121-126, pp. 637-641, 2012

Online since:

October 2011

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$35.00

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