A More Effective Technique of Design Synthesis for MEMS with Expected Performance

Abstract:

A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equations. This behavior equation group can be solved using any solution algorithm of non-linear equation group. Newton Iteration Method based on sensitivity is adopted. Comparing with Genetic Optimization Algorithm (GA) , computational workload of DSA is greatly decreased.

• Periodical: Applied Mechanics and Materials (Volumes 121-126)
• Pages: 637-641
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.121-126.637
• Online since: October 2011
• Authors: Shu Xun Chen
• Keywords: Annealing, Comparing, Design Synthesis, Direct Solution Algorithm, Genetic Algorithm (GA), Micro-Electromechanical System (MEMS), Simulated

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