The Design and Analysis of Universal Inertial Switch Based MEMS

Yong Ping Hao; Li Ya Bao; Shuang Xi Gu

doi:10.4028/www.scientific.net/AMM.157-158.308

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 157-158The Design and Analysis of Universal Inertial...

The Design and Analysis of Universal Inertial Switch Based MEMS

Abstract:

In this paper, a novel MEMS inertial switch is designed and characterized for the purpose of crash sensing for ammunition systems in which high-speed response is required for triggering the detonator. In order to keep the same sensitivity in different direction, the structure of an annular proof-mass suspended by four serpentine flexures is designed. The switch can be integrated with electronics, fast-acting，and lack of a requirement for continuous power, and can be used in a wide area. The motion of the inertial switch is analyzed by dynamic simulation under the 700g threshold acceleration in y direction, the simulation results show that the response time is 0.142ms and the contact time of the switch is about 5 , it illustrates that the response time is short enough and the impact time satisfy the ask. The von-mises stress of the structure is calculate, the maximum stress occurs in the serpentine flexures, the value is 60.61 MPa, much less than the yield strength of the silicon, the switch can be used time after time.

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Periodical:

Applied Mechanics and Materials (Volumes 157-158)

Pages:

308-311

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.157-158.308

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Online since:

February 2012

Authors:

Yong Ping Hao, Li Ya Bao, Shuang Xi Gu

Keywords:

Dynamic, Inertial Switch, MEMS, Universal

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References

[1] L.M. Roglance and J.B. Angell. A batch fabricated silicon accelerometer. IEEE Trans. Electron Devices，ED-6, 1979: 1911~(1917).

DOI: 10.1109/t-ed.1979.19795

Google Scholar

[2] http: /www. analog. com.

Google Scholar

[3] M. J. Jia, X. X. Li,. Z. H. Song, M.H. Bao, Y.L. Wang, H, Yang. J. Micromechanics and Microengineering. 17，567 (2007).

Google Scholar

[4] X. L. Yuan, Q. A. Huang Huang and L. X. P. Liao. J. Microsyst Technol. 14, 349(2007).

Google Scholar

[5] R.P. Larose and K.D. Murphy, J. Nonlinear Dyn, 5, (2009).

Google Scholar

[6] R.V. Field Jr and D.S. Eppb, J. Sensors and Actuators. 134, 109(2007).

Google Scholar

[7] Tadao Mastsunaga and Masayoshi Esashi. Acceleration switch with extended holding time using squeeze film effect for side airbag systems. Sensors and Actuators, 2002(100): 10~17.

DOI: 10.1016/s0924-4247(02)00039-0

Google Scholar

[8] Jeung Sang Go，Young—Ho Cho and Byung Man Kwak. Snapping micro-switches with adjustable acceleration threshold, Sensors and Actuators，A1996(83): 579~583.

DOI: 10.1109/sensor.1995.721926

Google Scholar