Analysis of Micro Structure’s Elastic Stiffness

Abstract:

Based on the calculation and analysis of three kinds of elastic beam’s stiffness coefficient in micro machined gyroscope, the results show: in the condition of small displacement，forces and displacement are linear relationship in clamped-clamped beam, crab-foot beam and bow beam; but as the displacement increases, the relationship between forces and displacement are obvious non-linear in clamped-clamped beam. When the displacement is three times the length of beam’s width, the bow beam’s force and displacement are linear relationship. By ANSYS crab-foot beam and bow beam’s stiffness is obtained, the simulation results and the polynomial fitting coefficient are all credible.

• Periodical: Applied Mechanics and Materials (Volumes 184-185)
• Pages: 890-895
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.184-185.890
• Online since: June 2012
• Authors: Li Shen, Shi Qiao Gao, An Ran Jiang, Cai Feng Wang
• Keywords: ANSYS, Beam, Micro-Gyroscope, Stiffness

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