Simulation Analysis of Parallel Cluster Tools in Semiconductor Manufacturing

Xiu Hong Zheng; Ke Fei Zhang

doi:10.4028/www.scientific.net/AMM.190-191.173

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 190-191Simulation Analysis of Parallel Cluster Tools in...

Simulation Analysis of Parallel Cluster Tools in Semiconductor Manufacturing

Abstract:

High throughput is critical to the success of semiconductor manufacturing. The complexity of cluster tools leads to higher throughput an increasingly challenging task. To compute the throughput of the cluster tool and simulate the system operation procedure, the simulation platform, named as ClusterSim, is developed. Moreover, the paper analyzes the performance of the parallel cluster tools by this platform and valid the simulation results using the theoretic model. The result shows that ClusterSim provides an effective tool for users to quickly evaluate many possible equipment configurations

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Periodical:

Applied Mechanics and Materials (Volumes 190-191)

Pages:

173-176

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.190-191.173

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Online since:

July 2012

Authors:

Xiu Hong Zheng, Ke Fei Zhang

Keywords:

Cluster Tools, Simulation, Throughput, Wafer

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References

[1] T. L. Perkinson, P. K. MacLarty, R. S. Gyurcsik, and R. K. Cavin, III. "Single-wafer Cluster Tool Performance: An Analysis of Throughput", IEEE Transactions on Semiconductor Manufacturing, vol. 7, 1994, p.369–373.

DOI: 10.1109/66.311340

Google Scholar

[2] T. L. Perkinson, R. S. Gyurcsik, and P. K. MacLarty. "Single-wafer Cluster Tool Performance: An Analysis of the Effects of Redundant Chambers and Revisitations Sequences on Throughput", IEEE Transactions on Semiconductor Manufacturing, vol. 9, 1996, p.384–400.

DOI: 10.1109/66.536110

Google Scholar

[3] X. H. Zheng, H. B. Yu, J. T. Hu. "A Generic Throughput Model for Parallel Cluster tool", Proceedings of the 2011 International Conference on Informatics, Cybernetics, and Computer Engineering, 2011, pp.215-222.

Google Scholar

[4] T. LeBaron, J. Domasche. "Optimizing Robot Algorithms with Simulation", Proceedings of the 2005 Winter Simulation Conference, 2005, pp.2211-2217.

DOI: 10.1109/wsc.2005.1574508

Google Scholar

[5] K. Schmidt, J. Weigang, O. Rose. "Modeling Semiconductor Tools for Small Lotsize Fab Simulations", Proceeding of the 2006 Winter Simulation Conference, 2006, pp.1811-1816.

DOI: 10.1109/wsc.2006.322959

Google Scholar

[6] A. K. Gupta, P. Lendermann, A. I. Sivakumar, J. Priyadi. "Simulation Analysis of Cluster Tool Operations in Wafer Fabrication", Proceeding of the 2008 Winter Simulation Conference. 2008, pp.2141-2147.

DOI: 10.1109/wsc.2008.4736312

Google Scholar