The Vibration and Measurement of Drive Mode of MEMS Gyroscope Based on the Image Processing

Abstract:

This paper introduces the working principle of the micromacined gyroscope, and establishes the drive equation of it. By solving the differential Equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures the vibration of the drive mode of the micromachined gyroscope. And it puts forward a novel displacement detect algorithm that based on the image processing, and with Matlab it verifies the analytical solution and the amplitude-frequency characteristics of drive mode of the micromachined gyroscope. This helps the study on the vibration of the micromacined gyroscope, and provides a new way to measure MEMS.

• Periodical: Applied Mechanics and Materials (Volume 197)
• Pages: 423-427
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.197.423
• Online since: September 2012
• Authors: Jie Zhao, Feng Lin Yao, Shi Qiao Gao, Chong Ren Gao
• Keywords: Drive Mode, Gyroscope, Image, Measurement, MEMS, Vibration

References

[1] CHI Xiao-zhu , CUI Jian and YAN Gui-zhen: Electrical Method to Measure the Dynamic Behaviour of a MEMS Gyroscope Sensor, CHINESE JOURNAL OF SENSORS AND ACTUATORS , Vol. 21 (2008)pp.559-562.

[2] Gao shiqiao, Liu Haipeng: MEMS Force(National defense industry Press, Beijing(2008), in press.

[3] Xiong {TTP}-4064 Bin, et al., Electrical Simulation of a micromacined Gyroscope's Self -excited Driving. Chinese journal of scientific instrument , Vol. 24(2003), pp.190-192, 200.

[4] Li Jinming. Capacitance micromacined-mechanical Gyroscope Design. Beijing: National defense industry Press, 2006, pp.34-38.

[5] LI Wan-yu, RUAN Ai-wu, LUO Jin-sheng, and FENG Pei-de: An Investigation into Interface Detectio n Technology for Micromachined Si Gyroscopes. MICROELECTRONICS, Vol. 29(1999), pp.343-346.

[6] JIANG Ming, HE Xiao-yuan: Optical testing of dynamic characteristic of vibrating wheel micromechanical gyroscope. OPTICS AND PRECISION ENGINEERING, Vol. 16(2008), pp.295-299.

[7] ZHAO Ying, LI Yu-fang and WANG Qi : Algorithm of moving vehicle position recognition based-on binary differential image , COMPUTER ENGINEERING AND DESIGN , Vol. 30(2009), pp.228-232.

[8] FAN JIU LUN, ZHAO FENG: Two-Dimensional Otsu's Curve Thresholding Segmentation Method for Gray-Level Images, ACTA ELECTRONICA SINICA, Vol. 35(2007) pp.751-755.

[9] JIA JIAN KE, HAN TUAN JUN andZHU Ning-zhou: Design of Analog Band-pass Filter Based on Matlab GUI, MODERN ELECTRONICS TECHNIQUE, Vol. 33(2010), pp.58-62.

[10] JIANG MING, YANG FU JUN, et al: Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography, OPTICS AND PRECISION ENGINEERING, Vol. 14(2006), pp.21-126.