Improved Design of 2-DOF Micro-Positional Stage Based on Parallel Structure with Flexible Sheet

Shao Yong Zheng; Yu Guo Cui; Fan Fang

doi:10.4028/www.scientific.net/AMM.201-202.24

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 201-202Improved Design of 2-DOF Micro-Positional Stage...

Improved Design of 2-DOF Micro-Positional Stage Based on Parallel Structure with Flexible Sheet

Abstract:

In order to obtain good static and dynamic characteristics of the 2-DOF micro-positional stage, improved design of developed stage were done. First, the part of displacement coupling for the stage was improved, which making the stage only have linear displacement at driving direction; Second, in order to acquire the highest natural frequency under the condition of given output displacement, micro-positional stage was designed by using the size optimization method. Finally, the static and dynamic characteristics of the stage were analyzed by the finite element software ANSYS. The finite element results show that: the stage completely eliminates the displacement coupling after improving design; under the condition of given 30 μm output displacement, natural frequency reaches 1.86 kHz.

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Periodical:

Applied Mechanics and Materials (Volumes 201-202)

Pages:

24-29

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.201-202.24

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Online since:

October 2012

Authors:

Shao Yong Zheng, Yu Guo Cui, Fan Fang

Keywords:

Displacement Coupling, Finite Element Analysis (FEA), Flexible Sheet, Micro-Positional Stage, Parallel Structure, Size Optimization

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