The Effects of Substrate Negative Bias Voltage on Morphology and Properties Base on Multi-Arc Ion Plating

Abstract:

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40Cr steel substrate was coated with Ti0.33Al0.67N films by Multi-arc ion technology. Analyses of substrate negative bias voltage on morphology thickness of the film, bonding strength and micro hardness and other properties. The substrate negative bias parameter designs within the scope of the existence of an optimal value, in order to get the optimal performance of the film.

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Periodical:

Edited by:

Xianghua Liu, Zhenhua Bai, Yuanhua Shuang, Cunlong Zhou and Jian Shao

Pages:

1235-1238

Citation:

L. Lu and G. G. Feng, "The Effects of Substrate Negative Bias Voltage on Morphology and Properties Base on Multi-Arc Ion Plating", Applied Mechanics and Materials, Vols. 217-219, pp. 1235-1238, 2012

Online since:

November 2012

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$41.00

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