The Effects of Substrate Negative Bias Voltage on Morphology and Properties Base on Multi-Arc Ion Plating

Abstract:

40Cr steel substrate was coated with Ti_0.33Al_0.67N films by Multi-arc ion technology. Analyses of substrate negative bias voltage on morphology thickness of the film, bonding strength and micro hardness and other properties. The substrate negative bias parameter designs within the scope of the existence of an optimal value, in order to get the optimal performance of the film.

• Periodical: Applied Mechanics and Materials (Volumes 217-219)
• Pages: 1235-1238
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.217-219.1235
• Online since: November 2012
• Authors: Long Lu, Guang Guang Feng
• Keywords: Bonding Strength, Microhardness, Morphology Thickness, Multi-Arc Ion Plating

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