The Effects of Substrate Negative Bias Voltage on Morphology and Properties Base on Multi-Arc Ion Plating
40Cr steel substrate was coated with Ti0.33Al0.67N films by Multi-arc ion technology. Analyses of substrate negative bias voltage on morphology thickness of the film, bonding strength and micro hardness and other properties. The substrate negative bias parameter designs within the scope of the existence of an optimal value, in order to get the optimal performance of the film.
Xianghua Liu, Zhenhua Bai, Yuanhua Shuang, Cunlong Zhou and Jian Shao
L. Lu and G. G. Feng, "The Effects of Substrate Negative Bias Voltage on Morphology and Properties Base on Multi-Arc Ion Plating", Applied Mechanics and Materials, Vols. 217-219, pp. 1235-1238, 2012