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Analysis and Simulation of Two Hinged Ends Micro-Beam Relaxation Process

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Abstract:

In order to explore micro-beam relaxation dynamics of MEMS, the beam deflection relaxation expression considering air slide-film damping effect was educed based on Euler–Bernoulli equation with boundary conditions of two hinged ends. The beam deflection relaxation process under over damping, critical damping and under damping was calculated used Maple. The relaxation simulation data of micro-beam with two hinged ends used ANSYS demonstrate that relaxation process conform to theoretical calculation and relaxation period of under damping relaxation approximate constant when damping coefficient is small, but increase significantly when damping coefficient is large.

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Periodical:

Applied Mechanics and Materials (Volumes 226-228)

Pages:

793-797

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.226-228.793

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Online since:

November 2012

Authors:

Xiao Wei Zhu, Wen Fang Wang

Keywords:

Damping, Deflection, Euler-Bernoulli Equation, Micro-Beam, Relaxation

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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