A Solution Processed ZnO Thin Film

Abstract:

The effect of Zinc-Oxide (ZnO) thin film annealed in different ambiences is presented. To achieve low cost and environmentally friendly process, ZnO aqueous solution is synthesized by dissolving zinc acetate dihydrate in deionized water directly. Zinc oxide aqueous solution of high solubility and stability is presented. High quality and dense Zinc oxide thin film is formed by spin coating. Annealing temperatures are in the range of 300 °C~500 °C, and annealing ambiences of both air and N2 are discussed.

• Periodical: Applied Mechanics and Materials (Volumes 239-240)
• Pages: 1585-1588
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.239-240.1585
• Online since: December 2012
• Authors: Yuh Chung Hu, David T.W. Lin, Hai Lin Lee, Pei Zen Chang
• Keywords: Solution Process, Thin Film Property, Thin Film Transistor, Zinc Oxide (ZnO)

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