Study on Calibration Technology for Helium Mass-Spectrometer Leak Detector

Lan Zhao; Yan Feng; Yong Jun Chen; Di Xin Zhang; Wen Jun Sun; Rui Fang Zhang

doi:10.4028/www.scientific.net/AMM.241-244.360

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 241-244Study on Calibration Technology for Helium...

Study on Calibration Technology for Helium Mass-Spectrometer Leak Detector

Abstract:

To calibrate the helium mass-spectrometer leak detector in-site in the whole range, a series of leaks with helium-permeable membranes of different leakage rates were connected to a helium mass-spectrometer leak detector separately, then a set of readings of standard leaks were gained, and the relation curves were fitted mathematically between the standard leakage rates and leakage readings so as to give a fitting formula between the whole-range readings and leakage rates. As a result, the simplicity and efficiency method make it suitable for calibrations of helium mass-spectrometer leak detector.

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Periodical:

Applied Mechanics and Materials (Volumes 241-244)

Pages:

360-363

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.241-244.360

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Online since:

December 2012

Authors:

Lan Zhao, Yan Feng, Yong Jun Chen, Di Xin Zhang, Wen Jun Sun, Rui Fang Zhang

Keywords:

Calibration, Helium Mass-Spectrometer Leak Detector, In-Site, Vacuum Standard Leak

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References

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