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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 249-250Flow Microsensor of Thermal Type for Measurements...

Flow Microsensor of Thermal Type for Measurements of Gas Fluxes

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Abstract:

An analytical model of the flow sensor of thermal type is developed. The results of the model application are used to develop a flow microsensor of thermal type with optimal functional characteristics. The technology of microsensor manufacturing is provided. The prototype of the microsensor suitable for use in the mass air flow meter is created. The basic characteristics of the microsensor are presented.

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Applied Mechanics and Mechanical Engineering III

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Periodical:

Applied Mechanics and Materials (Volumes 249-250)

Pages:

118-125

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.249-250.118

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Online since:

December 2012

Authors:

Oleg Sazhin

Keywords:

Flow Sensor of Thermal Type, Heat and Mass Transfer, Mass Flow Meter, Mass Flow Rate, MEMS

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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