Research on Phase Compensation of Nonlinearity Error in Heterodyne Interferometer

Abstract:

A novel method to eliminate nonlinearity error in heterodyne interferometer is studied in the paper. A simple phase compensation system is built and the nonlinearity error is eliminated by rotating the polarizer in front of the optical detector in interferometer according to phase difference signal. The experiments demonstrate that the method is available to eliminate one-order or high-order nonlinearity in heterodyne interferometer. The effects to decrease nonlinearity error depend on high measuring precision of phase difference and high control precision of the rotating polarizer.

• Periodical: Applied Mechanics and Materials (Volumes 263-266)
• Pages: 435-443
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.263-266.435
• Online since: December 2012
• Authors: Xiao Ren, Wen Mei Hou
• Keywords: Heterodyne Interferometer, Nonlinearity, Phase Compensation, Polarizer

References

[1] Quenelle R C: Nonlinearity in interferometric measurements. Hewlett-Packard J. 34 (1983)

[2] Hou W and Wilkening G:Investigation and compensation of the nonlinearity of heterodyne interferometers. PRECIS ENG 14(2) (1992), 91-98.

DOI: 10.1016/0141-6359(92)90054-z

[3] Stone JA and Howard LP: A simple technique for observing periodic nonlinearities in Michelson interferometers. PRECIS ENG 22 (4) (1998), 220-232 .

DOI: 10.1016/s0141-6359(98)00016-6

[4] Dubovitsky S, Lay OP and Seidel GJ: Elimination of heterodyne interferometer nonlinearity by carrier phase modulation. Opt. Soc. B 16 (1999), 267-269.

DOI: 10.1364/ol.27.000619

[5] Lawall J and Kessler E: Michelson Interferometry with 10 pm accuracy. Rev. Sci. Instrum. 71 (7) (2000), 2669-2676.

DOI: 10.1063/1.1150715

[6] Peggs GN and Yacoot A: A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry. PHILOS T ROY soc A 360 (1794) (2002), 953-968.

DOI: 10.1098/rsta.2001.0976

[7] Schmitz TL and Beckwith JF: Acousto-optic displacement-measuring interferometer: a new heterodyne interferometer with Angstrom-level periodic error. J. Mod. OPTIC 49 (13) (2002), 2105-2114.

DOI: 10.1080/09500340210123938

[8] T L Schmitz et al: First-order periodic error correction: validation for constant and non-constant velocities with variable error magnitudes. Meas. Sci. Technol.17 (2006),3195-3203.

DOI: 10.1088/0957-0233/17/12/001

[9] Hou W M,Zhao X B: The drift of the nonlinearity of heterodyne interferometers. Prec Eng16(1) (1994),25-34.

[10] Wenmei Hou and Jun Wang: Subdivision an Eliminate of the Nonlinearity in heterodyne interferometer.Acta Metrologica Sinica 28(3) (2007),210-215. In Chinese

[11] Wenmei Hou and Xiao Ren: Research on Compensation of Nonlinearity in heterodyne Interferometer. Applied Mechanics and Materials Vol. 36 (2010),303-310.

DOI: 10.4028/www.scientific.net/amm.36.303