The Study of Equivalent Circuit for Vibrating-Beam-Type Resonant Accelerometer

Abstract:

Based on the equivalent simplified model of the vibrating beam, the equivalent RLC circuit of vibrating-beam-type resonant accelerometer is described in detail, which shows that equivalent circuit contains a variable capacitances and a variable resistances due to the acceleration. Using the electromechanical coupling factor presented here and the mode function of the transverse deflection vibration of the double clamped beam, the equivalent parameters of the accelerometer with the size of the beam and comb are derived. These results are the bases of designing the drive /sense circuit of the vibrating-beam-type accelerometer.

• Periodical: Applied Mechanics and Materials (Volumes 263-266)
• Pages: 521-524
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.263-266.521
• Online since: December 2012
• Authors: Qin Wen Huang, Yu Bin Jia, Wen Xiao Fang
• Keywords: Accelerometer, Equivalent RLC Circuit, Vibrating-Beam Resonator

References

[1] Trey A. Roessig, Roger T. Howe, Albert P. Pisano, and James H. Smith, Surface-micromachined Resonant Accelerometer, 1997 International conference on solid-state Sensors and Actuators, Chicago, June 16-19: 859-862..

DOI: 10.1109/sensor.1997.635237

[2] Ashwin A. Seshia, Moorthi P alaniapan, Trey A. Roessig, Roger T. Howe: Journal of Microelectromechanical Systems, 2002, 11(6): 784-793

[3] C.Burrer, J.Esteve, and E.Lora-Tomayo: Journal of Microelectromechanical Systems, 1996, 5(2):122-130

[4] Jia Yu-bin, Hao Yi-long, Zhong, Yin, Zhang Rong: Micronanoelectronic Technology Vol.40, No.7/8, 2003, 271-273.

[5] Liwei Liu, Roger T.Howe, Albert P.Pissano: Journal of microelectromechanical systems, Vol.7, No.3, 1998, 286-293.