Envelope Method Applied on the AZO Thin Films

Abstract:

The AZO thin films had been prepared on glass substrates by APCVD process .The transmittance spectra of AZO thin films was measured with S-600 UV-Vis spectrophotometer . The visible light transmittance values of AZO thin films are about 85% and the thickness of the thin films well-distributed by the transmittance spectra of AZO films. Using the envelope method, the film thickness d is calculated about 964.43nm and the discrepancy is only 0.56% compared with the result of instrument measurements. The curve about the refractive index n with the incident wavelength is consistent with the reported literature results. The envelope method is suitable for the optical constants processing of some similar AZO films where exist weak absorption ranges (T≥0.4).

• Periodical: Applied Mechanics and Materials (Volumes 268-270)
• Pages: 202-206
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.268-270.202
• Online since: December 2012
• Authors: Ying Xu, Peng Hua Ma, Mo Ning Liu
• Keywords: Al-Doped ZnO Thin Films, Atmospheric Pressure Chemical Vapor Deposition, Envelope Method

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