Study of TiN Film Adhesion Strength by Pulsed-Laser Shock Detection Method

Abstract:

Bonding strength of the interface of film-substratum is an important factor and key problem that influence the reliability and usage of film-substratum system. The new technology of pulsed-laser shock detection method which analyzes the mechanism and mathematical model of film separation under the action of pulsed-laser shock,. With the example of measuring the adhesion strength of TiN/SKD11 film system, the surface was respectively impacted with pulsed-laser at the range of 650~1000mJ. To observe the surface topography of Impact points by scanning electron microscope, and to identify TiN film failure threshold by the reflected signal detection. By analyzing the experimental result, it was suggested that film/substrate interfacial adhesion strength was 4.954GW/cm2.

• Periodical: Applied Mechanics and Materials (Volumes 271-272)
• Pages: 372-377
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.271-272.372
• Online since: December 2012
• Authors: Bin Bin Yu, Jun Tang Yuan
• Keywords: Adhesion, Plasma, Pulse Laser, TiN Film

References

[1] K. D. Bouzakis, S Gerardis, katirzoglou G, et al. Application in milling of coated tools with rounded cutting edges after the film deposition". CIRP Annals- Manufacturing Technology, vol. 58, No. 1, pp.61-64, (2009).

DOI: 10.1016/j.cirp.2009.03.103

[2] V. F. Neto, R. Vaz, R. Ali, et al. Performance of sub-micron diamond films coated on mould inserts for plastic injection moulding. Journal of Materials Science, vol. 43, No. 10, pp.3392-3399, (2008).

DOI: 10.1007/s10853-007-2311-5

[3] Y. C. Huang, S. Y. Chang, C. H. Chang. Effect of residual stresses on mechanical properties and interface adhesion strength of SiN thin films. Thin Solid Films, vol. 517, No. 17, pp.4857-4861, (2009).

DOI: 10.1016/j.tsf.2009.03.043

[4] S. S. Zhao, W. G. Hua, H. Du, et al. A novel method for determining residual stresses of hard coatings. Acta Metallurgica Sinica, vol. 44, No. 1, pp.125-128, (2008).

[5] X. Yu, C. B. Wang, Y. Liu, et al. A study of hard diamond-like carbon films in mid-frequency dual-magnetron sputtering. Diamond and Related Materials, vol. 15, No. 9, pp.1223-1227, (2006).

DOI: 10.1016/j.diamond.2005.09.040

[6] L. Cai, M. Zhou, Y. K. Zhang. Theoretic modelling and correlation detection of pulsed laser film spallation technology. Journal of Jiangsu University of Science and Technology(Natural Science), vol. 21, No. 6, pp.4-8, (2000).

[7] K. L. Mittal. Adhesion measurement of films and coatings. The second international symposium on adhesion measurement of films and coatings. Boston USA: VSP, (2001).

DOI: 10.1515/9783112318966-002

[8] J. L. Vossen, K. L. Mittal. Adhesion measurements of thin films, thick films, and bulk coatings. Thick Films, vol. 640, pp.122-133, (1978).

DOI: 10.1520/stp640-eb

[9] M. Zhou, Y. K. Zhang, L. Cai. Measure- ment of film-substrate system interface strength by pulsed laser spallation technology. Progress in Natural Science, vol. 11, No. 5, pp.303-307, (2001).

[10] A. X. Feng, Y. K. Zhang, H. K. Xie. A study on the new method of laser scratch testing technique to characterize interfacial adhesion between thin film and substrate. Key engineering materials, No. 285-289, pp.615-619, (2004).

DOI: 10.4028/www.scientific.net/kem.259-260.615