Dielectric Charging Failure Analysis of RF-MEMS Switch

Ming Xin Song; Guo Xu Zheng; Rui Wu

doi:10.4028/www.scientific.net/AMM.274.170

Paper Titles

The Research of Layer System Subdivision and Adjustment Methods in YSL Block of the Low Permeability Reservoirs
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Large Margin Feature Selection for Support Vector Machine
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Effects of Die Tooth Profile on Forming Helical Tooth Shaft in Cross Wedge Rolling
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Dielectric Charging Failure Analysis of RF-MEMS Switch
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Assessment of the Three-Dimensional Surface Roughness Parameters
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Research on the Friction Mechanism and Minimum Steady Speed of Electro-Hydraulic Servo Motor
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The Characteristic Simulation Analysis Method Based on the Theory of Similarity for Combined Interface of Heavy Machine Tools
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An Investigation of Performance Characteristics of High-Voltage Trigatron
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 274Dielectric Charging Failure Analysis of RF-MEMS...

Dielectric Charging Failure Analysis of RF-MEMS Switch

Abstract:

MEMS devices commercialization is hindered by reality problems. Among them main problem is caused by dielectric charging. This paper studies charging model and charges distribution which are constructed on adhesion failure. Lifetime prediction formula is given. Simulation results show that under the condition of low driven voltage requirement, lifetime is bigger than 1000 hours when elastic coefficient (K) adopts 4-16N/m, 0.4-1μm for dielectric thickness, 2-5μm for plate distance and S3iN4 as dielectric material. At last, C-V performances inflected by dielectric charging is studied by theoretical calculations and analyzing positive or negative charging respectively.