Investigation of Plasma Generator Driving by High-Frequency High-Voltage Electric Source

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In this paper, a series resonant converter with high-frequency high-voltage transformer for plasma generator is presented. The high-frequency, high-voltage electric source is designed by employing a series load-resonant converter with the plasma generator as part of the electric circuit. The equivalent circuit of this high-frequency transformer modeled by the introduction of the stray capacitance is proposed and the circuit model of the high-voltage plasma generator is conducted as well. Thus, the overall model of the high-voltage plasma generator is built and the designing procedures for appropriate selections of the corresponding resonant-circuit parameters can be established. Finally, a high-voltage plasma generator with 220V, 60Hz, and 1kW input, plus a 22 kHz and over 8kV power converter output, is realized and implemented.

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1136-1140

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January 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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