Plasma Assisted Deposition Technology of Optical Coating

Abstract:

Plasma assisted deposition technology with an advanced plasma source and its application in the field of optical coating fabrication are investigated. In this paper, MgF2, Al2O3 and TiO2 single layer films are prepared by this technology, and the measure results show that they all have good optical parameter.

• Periodical: Applied Mechanics and Materials (Volumes 29-32)
• Pages: 463-467
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.29-32.463
• Online since: August 2010
• Authors: Xiao Hong Rong, Chun Xia Li, Xiao Yan Zhang, Yu Mei Wang, Wen Liang Wang
• Keywords: Optical Coatings, Plasma Assisted Deposition

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