Plasma Assisted Deposition Technology of Optical Coating
Plasma assisted deposition technology with an advanced plasma source and its application in the field of optical coating fabrication are investigated. In this paper, MgF2, Al2O3 and TiO2 single layer films are prepared by this technology, and the measure results show that they all have good optical parameter.
X. H. Rong et al., "Plasma Assisted Deposition Technology of Optical Coating", Applied Mechanics and Materials, Vols. 29-32, pp. 463-467, 2010