Fabrication of Self-Supported Al/Polyimide/Al Film with Thick Supporting Nickel Mesh

Wei Hu; Tian Xiang Chen; Qing Rong Sun; Yong Chen; Wei Wei Cui; Zi Liang Zhang; Wei Li; Yu Sa Wang; Da Wei Han; Juan Wang; Bo Lu; Jia Huo; Mao Shun Li; Yi Zhang; Guo He Yin; Yan Ji Yang; Xiao Yan Liu; Yue Zhu; Cheng Kui Li; Yan Liu; Di Wu

doi:10.4028/www.scientific.net/AMM.290.21

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 290Fabrication of Self-Supported Al/Polyimide/Al Film...

Fabrication of Self-Supported Al/Polyimide/Al Film with Thick Supporting Nickel Mesh

Abstract:

We present the fabrication of submicron polyimide film sandwiched by Al film. The preparation in two-step method and spin-coating parameters of submicron polyimide film are described. To achieve self-supported structure, thick nickel mesh (ca. 200 μm) was introduced by micro-electroforming. Using negative tone photoresist SU-8 2150, the nickel grid width was demonstrated in good agreement with its original design value with optical microscopy.