The Effects of N2 Flow Rates on the Properties of Ti-Al-Si-N Films Deposited by Arc Ion Plating

Chang Jie Feng; Li Xin; Sheng Long Zhu; Zhi Song Shao

doi:10.4028/www.scientific.net/AMM.291-294.2694

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 291-294The Effects of N2 Flow Rates on the Properties of...

The Effects of N₂ Flow Rates on the Properties of Ti-Al-Si-N Films Deposited by Arc Ion Plating

Abstract:

Ti-Al-Si-N films were deposited on 1Cr11Ni2W2MoV steel at different N2 flow rates from 0 to 600 sccm by AIP using a Ti60Al30Si10 target. The effects of the N2 flow rates on the deposition rate, composition, microstructure, microhardness and adhesion property of the films were investigated by SEM/EDS, XRD, microhardness and scratch tests, respectively. The results show that the deposition rate of the films decreased initially and then began to increase at N2 flow rate higher than 300 sccm. The microhardness of the films increased with the N2 flow rate except a slight drop at 450sccm. The evolution of adhesion property of the films was very similar to that of microhardness. All the Ti-Al-Si-N films had B1 NaCl structure with (220) preferred orientation except that at 600 sccm. The effects of the N2 flow rate on the properties of the Ti-Al-Si-N films were discussed.

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Periodical:

Applied Mechanics and Materials (Volumes 291-294)

Pages:

2694-2697

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.291-294.2694

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Online since:

February 2013

Authors:

Chang Jie Feng, Li Xin, Sheng Long Zhu, Zhi Song Shao

Keywords:

Adhesion Property, Microhardness, Microstructure, N₂ Flow Rate, Ti-Al-Si-N Films

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References

[1] Li Chen, She Q. Wang, Yong Du, Shu Z. Zhou, Tie Gang, Ji C. Fen, Ke K. Chang, Yi W. Li, Xiang Xiong: Surf. Coat. Technol. Vol. 205 (2010), p.582–586.

Google Scholar

[2] Qiang RU, Shejun HU, Nacan HUANG, Lingzhi ZHAO, Xiuli QIU, Xianqi HU: Rare Metals Vol. 27 (2008), p.251–256.

Google Scholar

[3] Sun Kyu Kim, Vinh Van Le: Thin Solid Films Vol. 518 (2010), p.7483–7486.

Google Scholar

[4] Changjie Feng, Mingsheng Li, Li Xin, Shenglong Zhu, Fuhui Wang: Oxid. Met. Vol. 65 (2006), p.307–327.

Google Scholar

[5] M. Keunecke, C. Stein, K. Bewilogua, W. Koelker, D. Kassel, H. van den Berg: Surf. Coat. Technol. Vol. 205 (2010), p.1273–1278.

DOI: 10.1016/j.surfcoat.2010.09.023

Google Scholar

[6] Donghai Yu, Chengyong Wang, Xiaoling Cheng, Fenglin Zhang: Thin Solid Films Vol. 517 (2009), p.4950–4955.

Google Scholar

[7] Fei Cai, Shihong Zhang, Jinlong Li, Zhong Chen, Mingxi Li, Lei Wang: Appl. Surf. Sci. Vol. 258 (2011), p.1819–1825.

Google Scholar

[8] D. Philippon,V. Godinho, P.M. Nagy, M.P. Delplancke–Ogletree, A. Fernández: Wear Vol. 270 (2011), p.541–549.

DOI: 10.1016/j.wear.2011.01.009

Google Scholar