Research of Solar Photoelectric Micro-Power Supply on Chip

Abstract:

In order to reduce volume of MEMS wireless sensor with solar photoelectric micro-power supply, the integration scheme of solar photoelectric micro-power supply on chip is proposed in the paper. The scheme is consisted of seven main process steps, and has higher process compatibility. The characteristics of the integrated devices of the solar photoelectric micro-power supply are analyzed by using the semiconductor theory. The results show the device characteristics meet the requirement of the solar photoelectric micro-power supply. Moreover, the technology improving conversion efficiency of solar cells on chip is proposed by use of the back surfaces field (BSF). The conversion efficiency of solar cells reached 13.4%

• Periodical: Applied Mechanics and Materials (Volume 302)
• Pages: 776-781
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.302.776
• Online since: February 2013
• Authors: Yong Tai He, Li Xian Xiao, Rui Ming Liu
• Keywords: Micro-Power Supply, On-Chip, Solar Cell, Wireless Sensor

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