Experiment Study of Vacuum Material Outgassing Rates

Abstract:

This paper based on an equipment which measure the outgassing of vacuum material,adopt some method, constant volume, otiose flux and double channels and so on, testing the deflation of stainless steel(316、304)brass H62, aluminium2A12, and other representative material deflation.We adopt light eradiate to heat up, and the temperature control range is 23°C~300°C, we study the rule of outgassing rate at different temperature, and use QSM to analyze the component of gas.

• Periodical: Applied Mechanics and Materials (Volumes 303-306)
• Pages: 367-371
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.303-306.367
• Online since: February 2013
• Authors: Xue Min Sheng, Xiao Bin Wu, Yan Feng, Meng Dong, Yong Jun Cheng, Rui Fang Zhang
• Keywords: Constant Volume Method, Material Outgassing Rates, Orifice Conductance Method, SPP Method

References

[1] Daoan Da. The design manual of vacuum. [M] National defence industry press, (2004).

[2] Yuzhi Wang, Xu Chen. Vacuum Technology. [M] Beihang University press, (2007).

[3] K Saito, Y Sato, S Inayoshi, S Tsukahara. [J] Vacuum, 1996, 47: 749~752.

[4] Y Yang, K Saitoh, S Tsukahara. [J] Vacuum, 1995, 46: 1371~1376.

[5] K Ishizawa, H Kurisu, S Yamanoto. XXIInd Int. Symp. On Discharges and Electrical Insulation in Vacuum-Matsue. (2006).

[6] Xiaotian Yang, Jun Meng, Junhui Zhang. [J] Vacuum, 2004, 41: 24~26. In Chinese.

[7] Chunguang Yang, Youming Xiao, Lie Xu. [J] Vacuum, 2007, 44(3): 75~77. In Chinese.

[8] N Schindler, D Schleurner, Chr Edelmann. [J]. Vacuum, 1996, 47: 351~355.

[9] Dizhou Guo, Junhui Zhang, Jun Meng, Xiaotian Yang. [J] Chinese Journal of Vacuum Science and Techonology, 2011, 31: 368~371. In Chinese.