The Study of Luminous Flux Method for Rapid Measurement of Micro-Aperture Area

Abstract:

This paper presents a new method for micro-aperture measurement based on luminous flux. The principle and the structure of micro-aperture measurement system are introduced in detail. Compared with previous measurement methods, the proposed method has several advantages: The measuring head with array line structure can measure several apertures’ area directly at the same time. The shape of the aperture is not limited to a circle or any other shape. It is a measuring technique with high precision and low cost. The test results show that the uncertainty is mm of a circular 0.5 mm diameter aperture, and the average linearity value is 3.47% to the aperture which diameter in the range from 150 to 500um.

• Periodical: Applied Mechanics and Materials (Volumes 321-324)
• Pages: 671-675
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.321-324.671
• Online since: June 2013
• Authors: Ming Ye, Dong Jing Xu, Zhi Qiang Ni
• Keywords: Luminous Flux, Measurement, Micro-Aperture

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