Research on Graphic Displaying Algorithm for Electron Beam Lithography

Xiu Yi Wang; Guang Rong Fang; Bo Li

doi:10.4028/www.scientific.net/AMM.336-338.2054

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 336-338Research on Graphic Displaying Algorithm for...

Research on Graphic Displaying Algorithm for Electron Beam Lithography

Abstract:

It takes too much time for the software system of electron beam lithography to display files with large amount of graphic data, which affects the efficiency of electron beam lithography. In this paper, a graphic displaying algorithm is proposed and experimented. The result shows that the displaying algorithm not only guarantees the precision of the graphic data, but also displays files with large amount of graphic data fast, improving the efficiency effectively.

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Periodical:

Applied Mechanics and Materials (Volumes 336-338)

Pages:

2054-2058

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.336-338.2054

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Online since:

July 2013

Authors:

Xiu Yi Wang, Guang Rong Fang, Bo Li

Keywords:

Algorithm (GA), Electron Beam Lithography, Graphic Displaying

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References

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